Item

Unit

Parameter

Testing/Analysis Method

P-type Resistivity

(ohm.cm)

200-500

KDY-2 Resistivity/Resistance Meter

Boron

ppba

0.5-1.2

LT-FTIR

N-type Resistivity

Ohm.cm

2-25

KDY-2 Resistivity/Resistance Meter

Donor

ppba

3

LT-FTIR; ICP-MS

N-type minority electron carrier lifetime

uS

100 min.

LT-IC Lifetime Tester

Carbon content

at/cm3

0.5x1016 max.

FTIR

Oxygen content

at/cm3

1.0x1017 max.

FTIR

Total metal impurity (Fe, Cr, Ni, Cu, Zn, Na, K, Ca)

ppmw

0.05-0.5 max.

ICP-MS

Status

Surface

Grey, Luster free, rough

Visual observation

Section

Oxidized layer free

Optical microscope

Others